
The 3D atom probe is a near-atomic resolution materials characterization method that works by evaporating a really tiny (we're talking about <100 nm here) needle and reconstructing the evaporated mass via time-of-flight mass spectroscopy to get beautiful volumes.







Schematic of the atom probe.

SE micrograph of atom probe specimen.
Understanding γ'-phase formation superalloys processed with different parameters.
Field of view = 165 nm (left), 80 nm (right).
Complex structures of transistor devices.
Field of view = 70 nm.
Understanding chemistry of oxide layer formed on top of metal/alloy surfaces.
Field of view = 50 nm.
Dislocations are commonly marked by some elemental segregation in complex alloys.
Field of view = 90 nm.
Multilayered thin films are common among advanced semiconductor applications.
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